You cannot e-file your return with an ITIN application. You'll need to print, sign, and mail your return along with the Form W-7 and required documents to the ITIN processing unit at the following address:
Internal Revenue Service
ITIN Operation
PO Box 149343
Austin, TX 78714-9342
After the ITIN has been issued, your tax return will be forwarded on to the proper IRS service center for processing.