My husband and dependents who don't have an ITIN and SSN

I have an SSN and a 1099-NEC income. My husband and 2 children have been living with me since 2022, but they don't have an SSN/ITIN. I'm filing W7 forms for my husband and children along with my return. Can I file as an MFJ? Can I claim my 2 children? How to fill my husband's and dependents' SSNs when applying for ITINs? Can I send W7 forms online with my return or mail them?  Will I get a CTC or ODC and EITC if I file W7 forms for them?